Product Description
Precision Manual Lead Screw Probe Station
The AT-LS6 Manual Wafer Probe Station is a powerful, yet economical, and easy to use analytical probe station. This probe station is ideally suited for a wide range of engineering applications; Design Analysis, Failure Analysis, Production Process Analysis, Device Characterization, Reliability Testing, and Parametric IV/CV Testing. A very economical and versatile tool for small feature probing.
Precision Lead Screw X-Y manual stage controls are easily operated with one or both hands while positioning the wafer, while looking through the microscope. The manual AT-LS6 probe station has a probing target Capability from large pads to submicron lines and design features.
Vacuum Wafer Chuck is selectable as 6 diameter, either of which is capable of accepting smaller wafer sizes. Wafer slices, individual die, or hybrid substrates are accommodated using an accessory SVAC-PUC vacuum concentrator on the chuck surface. Vacuum Wafer Chucks are available for both ambient and thermal applications and come with durable stainless steel surfaces.
Platen Fast Lift is designed to make repetitive probing activities easy and has vertical locking position.
Microscope Options: The manual AT-LS6 probe station accommodates both high magnification compound microscopes and stereo zoom microscopes. The fixed microscope post is ideal for high magnification and laser applications. A full complement of optical accessories is available, as well as video camera systems.
Modular Design: Wafer probe stations are designed as a platform on which to build on as engineering or analysis task expand with new design disciplines and as feature sizes shrink. A wide variety of system accessories and options are readily available to fit changing needs.
